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Semiconductor Optoelectronics, Volume. 45, Issue 2, 286(2024)

Error Compensation of Long Stroke Displacement Instrument Interference Ranging System

WANG Yumeng1,2,3, YANG Fan1,2, CHEN Qingrong1,2, YU Siyang1,2, ZHANG Xi1,2, SUN Si1,2, and YAN Wei1,2,3
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    WANG Yumeng, YANG Fan, CHEN Qingrong, YU Siyang, ZHANG Xi, SUN Si, YAN Wei. Error Compensation of Long Stroke Displacement Instrument Interference Ranging System[J]. Semiconductor Optoelectronics, 2024, 45(2): 286

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    Received: Dec. 12, 2023

    Accepted: --

    Published Online: Aug. 14, 2024

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2023121202

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology