Acta Optica Sinica, Volume. 41, Issue 2, 0212005(2021)

Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase

Wenqian Lu, Jianxin Li*, Mingliang Duan, Yixuan Xu, and Yi Zong
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
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    References(14)

    [1] Deck L. Vibration-resistant phase-shifting interferometry[J]. Applied Optics, 35, 6655-6662(1996).

    [2] Chen M, Guo H, Wei C. Algorithm immune to tilt phase-shifting error for phase-shifting interferometers[J]. Applied Optics, 39, 3894-3898(2000).

    [3] Ngoi B K, Venkatakrishnan K, Sivakumar N R. Phase-shifting interferometry immune to vibration[J]. Applied Optics, 40, 3211-3214(2001).

    [4] Xu J, Xu Q, Chai L. Iterative algorithm for phase extraction from interferograms with random and spatially nonuniform phase shifts[J]. Applied Optics, 47, 480-485(2008).

    [5] Deck L. Suppressing phase errors from vibration in phase-shifting interferometry[J]. Applied Optics, 48, 3948-3960(2009).

    [6] Vargas J, Quiroga J A, Alvarez-Herrero A et al. Phase-shifting interferometry based on induced vibrations[J]. Optics Express, 19, 584-596(2011).

    [11] Wielgus M, Sunderland Z, Patorski K. Two-frame tilt-shift error estimation and phase demodulation algorithm[J]. Optics Letters, 40, 3460-3463(2015).

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    Wenqian Lu, Jianxin Li, Mingliang Duan, Yixuan Xu, Yi Zong. Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase[J]. Acta Optica Sinica, 2021, 41(2): 0212005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 17, 2020

    Accepted: Aug. 28, 2020

    Published Online: Feb. 27, 2021

    The Author Email: Li Jianxin (ljx@vip.163.com)

    DOI:10.3788/AOS202141.0212005

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