Acta Optica Sinica, Volume. 41, Issue 2, 0212005(2021)
Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase
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Wenqian Lu, Jianxin Li, Mingliang Duan, Yixuan Xu, Yi Zong. Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase[J]. Acta Optica Sinica, 2021, 41(2): 0212005
Category: Instrumentation, Measurement and Metrology
Received: Jul. 17, 2020
Accepted: Aug. 28, 2020
Published Online: Feb. 27, 2021
The Author Email: Li Jianxin (ljx@vip.163.com)