Acta Optica Sinica, Volume. 41, Issue 2, 0212005(2021)
Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase
Figures & Tables(7)
Fig. 3. Simulation results. (a) Phase result obtained by calculation; (b) deviation distributions of the calculated result and the test phase
Fig. 4. Interferograms collected in the experiment. (a) Random tilt; (b) phase-shifting is π/2
Fig. 5. Measurement results of different methods. (a) Direct four-step method; (b) our method; (c) synchronous phase shift method; (d) surface deviation distribution map
Table 1. Four sets of simulation data statistics resultsunit: λ
View tableTable 1. Four sets of simulation data statistics resultsunit: λ
Result 1 2 3 4 PV RMS PV RMS PV RMS PV RMS Surface map 0.2001 0.0340 0.2115 0.0358 0.2092 0.0345 0.2072 0.0344 Residual error 0.0453 0.0055 0.0438 0.0060 0.0418 0.0057 0.0327 0.0044
Table 2. Comparison between the proposed method and the simultaneous phase-shifting methodunit: λ
View tableTable 2. Comparison between the proposed method and the simultaneous phase-shifting methodunit: λ
Result 1 2 3 4 PV RMS PV RMS PV RMS PV RMS Our method 0.2224 0.0361 0.2215 0.0361 0.2206 0.0362 0.2215 0.0362 Simultaneous method 0.2094 0.0360 0.2084 0.0360 0.2087 0.0361 0.2080 0.0361 Residual error 0.0855 0.0053 0.0844 0.0050 0.0878 0.0052 0.0849 0.0051
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Wenqian Lu, Jianxin Li, Mingliang Duan, Yixuan Xu, Yi Zong. Anti-Vibration Interferometric Shape Measurement Based on Tilt Phase[J]. Acta Optica Sinica, 2021, 41(2): 0212005
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jul. 17, 2020
Accepted: Aug. 28, 2020
Published Online: Feb. 27, 2021
The Author Email: Li Jianxin (ljx@vip.163.com)
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