Chinese Optics Letters, Volume. 10, Issue 7, 071202(2012)
Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement
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Bofan Wang, Zhongliang Li, Xiangzhao Wang, "Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement," Chin. Opt. Lett. 10, 071202 (2012)
Category: Instrumentation, measurement, and metrology
Received: Dec. 5, 2011
Accepted: Jan. 18, 2012
Published Online: Apr. 5, 2012
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