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Chinese Optics Letters, Volume. 10, Issue 7, 071202(2012)

Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement

Bofan Wang, Zhongliang Li, and Xiangzhao Wang
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Bofan Wang, Zhongliang Li, Xiangzhao Wang, "Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement," Chin. Opt. Lett. 10, 071202 (2012)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Dec. 5, 2011

Accepted: Jan. 18, 2012

Published Online: Apr. 5, 2012

The Author Email:

DOI:10.3788/col201210.071202

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laser devices and laser physics
Lasers and Laser Optics
Laser physics
laser manufacturing
Instrumentation, Measurement and Metrology