Optical Technique, Volume. 50, Issue 4, 466(2024)

Vibration correction algorithm for surface stress sensitive film technology

ZHOU Datang1,2, HE Gang1, YAN Laijun2、*, CHEN Shuang2, and CHEN Xiaodong3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(16)

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    ZHOU Datang, HE Gang, YAN Laijun, CHEN Shuang, CHEN Xiaodong. Vibration correction algorithm for surface stress sensitive film technology[J]. Optical Technique, 2024, 50(4): 466

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    Paper Information

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    Received: Jan. 3, 2024

    Accepted: --

    Published Online: Aug. 16, 2024

    The Author Email: Laijun YAN (laijun11-11@163.com)

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