Optical Technique, Volume. 50, Issue 4, 466(2024)
Vibration correction algorithm for surface stress sensitive film technology
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ZHOU Datang, HE Gang, YAN Laijun, CHEN Shuang, CHEN Xiaodong. Vibration correction algorithm for surface stress sensitive film technology[J]. Optical Technique, 2024, 50(4): 466
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Received: Jan. 3, 2024
Accepted: --
Published Online: Aug. 16, 2024
The Author Email: YAN Laijun (laijun11-11@163.com)
CSTR:32186.14.
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