Chinese Journal of Lasers, Volume. 48, Issue 8, 0802010(2021)
Research progress on fabrication and applications of high-performance films by pulsed laser deposition
[3] Kuppusami P, Raghunathan V S. Status of pulsed laser deposition: challenges and opportunities[J]. Surface Engineering, 22, 81-83(2006).
[5] Zhang R M, Li Z H, Zhong Z C et al. Dynamic principle of pulsed laser deposition[M](2011).
[11] Fourmont P, Gerlein L F, Fortier F X et al. Highly efficient thermoelectric microgenerators using nearly room temperature pulsed laser deposition[J]. ACS Applied Materials & Interfaces, 10, 10194-10201(2018).
[15] Casari C S, Giannuzzi C S, Russo V. Carbon-atom wires produced by nanosecond pulsed laser deposition in a background gas[J]. Carbon, 104, 190-195(2016).
[21] Caricato A P, Luches A. Applications of the matrix-assisted pulsed laser evaporation method for the deposition of organic, biological and nanoparticle thin films: a review[J]. Applied Physics A, 105, 565-582(2011).
[23] Castillejo M, Ossi P M, Zhigilei L. Lasers in materials science[M](2014).
[26] Chen J K, Beraun J E, Tham C L. Ultrafast thermoelasticity for short-pulse laser heating[J]. International Journal of Engineering Science, 42, 793-807(2004).
[29] Yang Y F. Study on preparation and properties of ZnO thin films by PLD[D]. Wuhan: Huazhong University of Science and Technology(2008).
[30] Tang W Z. Preparation principle, technology and application of thin film materials[M]. 2nd ed(2003).
[34] Nikov R G, Nedyalkov N N, Atanasov P A et al. Characterization of Ag nanostructures fabricated by laser-induced dewetting of thin films[J]. Applied Surface Science, 374, 36-41(2016).
[35] Angelina J T T, Ganesan S, Panicker T M R et al. Pulsed laser deposition of silver nanoparticles on prosthetic heart valve material to prevent bacterial infection[J]. Materials Technology, 32, 148-155(2017).
[41] Gontad F, Lorusso A, Manousaki A et al. Morphology and structure of Nb thin films grown by pulsed laser deposition at different substrate temperatures[J]. Journal of Materials Science & Technology, 32, 1192-1196(2016).
[53] Cropper M D. Thin films of AlCrFeCoNiCu high-entropy alloy by pulsed laser deposition[J]. Applied Surface Science, 455, 153-159(2018).
[54] Lu T W, Feng C S, Wang Z et al. Microstructures and mechanical properties of CoCrFeNiAl0.3 high-entropy alloy thin films by pulsed laser deposition[J]. Applied Surface Science, 494, 72-79(2019).
[57] Koh A T T, Foong Y M, Chua D H C. Comparison of the mechanism of low defect few-layer graphene fabricated on different metals by pulsed laser deposition[J]. Diamond and Related Materials, 25, 98-102(2012).
[58] Fortgang P, Tite T, Barnier V et al. Robust electrografting on self-organized 3D graphene electrodes[J]. ACS Applied Materials & Interfaces, 8, 1424-1433(2016).
[69] Yao J, Zheng Z, Yang G. Layered tin monoselenide as advanced photothermal conversion materials for efficient solar energy-driven water evaporation[J]. Nanoscale, 10, 2876-2886(2018).
[70] Serna M I, Hasan S M N, Nam S et al. Low-temperature deposition of layered SnSe2 for heterojunction diodes[J]. Advanced Materials Interfaces, 5, 1800128(2018).
[71] Wang H C, Chan C H, Suen C H et al. Magnetotransport properties of layered topological material ZrTe2 thin film[J]. ACS Nano, 13, 6008-6016(2019).
[74] Karnati P, Haque A, Taufique M F N et al. A systematic study on the structural and optical properties of vertically aligned zinc oxide nanorods grown by high pressure assisted pulsed laser deposition technique[J]. Nanomaterials, 8, E62(2018).
[78] Scheiderer P, Schmitt M, Gabel J et al. Tailoring materials for mottronics: excess oxygen doping of a prototypical Mott insulator[J]. Advanced Materials (Deerfield Beach, Fla.), 30, e1706708(2018).
[89] Wang X Y, Tang Y Z. Mechanical properties of composite materials[M]. Changsha: National University of Defense Technology press(1988).
[109] Ni S B, Huang P, Chao D L et al. Amorphous GaN@Cu freestanding electrode for high-performance Li-ion batteries[J]. Advanced Functional Materials, 27, 1701808(2017).
[112] Dykas M, Desai S K, Patra A et al. Identification of biofilm inhibitors by screening combinatorial libraries of metal oxide thin films[J]. ACS Applied Materials & Interfaces, 10, 12510-12517(2018).
[115] Kim Y W, Sardari S E, Meyer M T et al. An ALD aluminum oxide passivated surface acoustic wave sensor for early biofilm detection[J]. Sensors and Actuators B, 163, 136-145(2012).
[121] Den J H, Ren T S, Ju L L et al. High-temperature interface superconductivity in bilayer copper oxide films by pulsed laser deposition[J]. Science China Materials, 63, 128-135(2020).
[127] Khan T M, Mujawar M A, Siewerska K E et al. Atmospheric pulsed laser deposition and thermal annealing of plasmonic silver nanoparticle films[J]. Nanotechnology, 28, 445601(2017).
[131] Eason R. Pulsed laser deposition of thin films[M]. Hoboken: John Wiley & Sons, Inc.(2006).
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Zhongyang Deng, Qiang Jia, Bin Feng, Lei Liu. Research progress on fabrication and applications of high-performance films by pulsed laser deposition[J]. Chinese Journal of Lasers, 2021, 48(8): 0802010
Category: laser manufacturing
Received: Dec. 1, 2020
Accepted: Feb. 23, 2021
Published Online: Mar. 31, 2021
The Author Email: Liu Lei (liulei@tsinghua.edu.cn)