Chinese Journal of Lasers, Volume. 48, Issue 8, 0802010(2021)

Research progress on fabrication and applications of high-performance films by pulsed laser deposition

Zhongyang Deng, Qiang Jia, Bin Feng, and Lei Liu*
Author Affiliations
  • Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
  • show less
    Figures & Tables(6)
    Schematic of PLD fundamental[4]
    Metal thin films prepared by PLD. (a) Dense and loose composite structure silver nanoparticle film and its preparation principle[31];(b) porous silver nanoparticle film[19];(c) silver nanoisland thin film[33];(d) Au nanocolumn thin film[37]; (e) columnar structure niobium thin film[41]
    Supersaturated AgCu alloy nanoparticle film fabricated by PLD[48]. (a) SEM image of film; (b) TEM image of supersaturated AgCu alloy nanoparticles; (c) EDS result of Ag element distribution; (d) EDS result of Cu element distribution
    Carbon films fabricated by PLD. (a) TEM image of graphene[57]; (b) FESEM image of DLC particle film[61]; (c) STEM image of graphene-oxide-like film[59]; (d) SEM image of foam structure carbon film[64]
    Compound films fabricated by PLD. (a) SEM image of GaSe nano lamellar membrane structure[67]; (b) TEM image of ultra-thin SnSe2 film; (c) atomic resolution HAADF-STEM image of (La0.2Pr0.2Nd0.2Sm0.2 Eu0.2)2CuO4 with Ruddlesden-Popper (RP) structure and its crystal structure[80]; (d) HAADF-STEM image of single crystal Fe3O4 film[72]; (e) SEM image of amorphous BErT thin film[9]; (f) high resolution TEM image of ultra-thin amorphous BP(a-BP) film[81]
    Composite films fabricated by PLD. (a) STEM image of SRO/BTO/SRO heterostructure[90]; (b) SEM image and structure diagram of BaTiO3/Fe3O4 heterostructure[92]; (c) STEM image of three-demension NZFO/BTO column nanocomposite film[94]; (d) SEM image of CuO-ZnO nanorod composite film and TEM image of single CuO-ZnO nanorod[95]; (e) HAADF image (left), LAADF image (middle), and the magnified HAADF image (right) of CeO2/Y2O3 nanobrush structure[96]; (f) cross section TEM image and structure diagram of Li2MnO3-Au nanocomposite film with inclined gold column[97]
    Tools

    Get Citation

    Copy Citation Text

    Zhongyang Deng, Qiang Jia, Bin Feng, Lei Liu. Research progress on fabrication and applications of high-performance films by pulsed laser deposition[J]. Chinese Journal of Lasers, 2021, 48(8): 0802010

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: Dec. 1, 2020

    Accepted: Feb. 23, 2021

    Published Online: Mar. 31, 2021

    The Author Email: Liu Lei (liulei@tsinghua.edu.cn)

    DOI:10.3788/CJL202148.0802010

    Topics