Chinese Journal of Lasers, Volume. 48, Issue 8, 0802010(2021)
Research progress on fabrication and applications of high-performance films by pulsed laser deposition
Fig. 3. Supersaturated AgCu alloy nanoparticle film fabricated by PLD[48]. (a) SEM image of film; (b) TEM image of supersaturated AgCu alloy nanoparticles; (c) EDS result of Ag element distribution; (d) EDS result of Cu element distribution
Fig. 5. Compound films fabricated by PLD. (a) SEM image of GaSe nano lamellar membrane structure[67]; (b) TEM image of ultra-thin SnSe2 film; (c) atomic resolution HAADF-STEM image of (La0.2Pr0.2Nd0.2Sm0.2 Eu0.2)2CuO4 with Ruddlesden-Popper (RP) structure and its crystal structure[80]; (d) HAADF-STEM image of single crystal Fe3O4 film[72]; (e) SEM image of amorphous BErT thin film[9]; (f) high resolution TEM image of ultra-thin amorphous BP(a-BP) film[81]
Fig. 6. Composite films fabricated by PLD. (a) STEM image of SRO/BTO/SRO heterostructure[90]; (b) SEM image and structure diagram of BaTiO3/Fe3O4 heterostructure[92]; (c) STEM image of three-demension NZFO/BTO column nanocomposite film[94]; (d) SEM image of CuO-ZnO nanorod composite film and TEM image of single CuO-ZnO nanorod[95]; (e) HAADF image (left), LAADF image (middle), and the magnified HAADF image (right) of CeO2/Y2O3 nanobrush structure[96]; (f) cross section TEM image and structure diagram of Li2MnO3-Au nanocomposite film with inclined gold column[97]
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Zhongyang Deng, Qiang Jia, Bin Feng, Lei Liu. Research progress on fabrication and applications of high-performance films by pulsed laser deposition[J]. Chinese Journal of Lasers, 2021, 48(8): 0802010
Category: laser manufacturing
Received: Dec. 1, 2020
Accepted: Feb. 23, 2021
Published Online: Mar. 31, 2021
The Author Email: Liu Lei (liulei@tsinghua.edu.cn)