Chinese Journal of Lasers, Volume. 50, Issue 6, 0605003(2023)
Lithography Illumination System Based on Fourier Synthesis Technology
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Hui Li, Xiaobin Wu, Xiaoquan Han, He Ma, Pengfei Sha. Lithography Illumination System Based on Fourier Synthesis Technology[J]. Chinese Journal of Lasers, 2023, 50(6): 0605003
Category: Beam transmission and control
Received: Sep. 6, 2022
Accepted: Oct. 19, 2022
Published Online: Feb. 14, 2023
The Author Email: Wu Xiaobin (wuxiaobin@ime.ac.cn)