International Journal of Extreme Manufacturing, Volume. 7, Issue 1, 15601(2025)
Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence
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Liu Jiamin, Zhu Jinlong, Yu Zhe, Feng Xianrui, Li Zedi, Zhong Lei, Zhang Jinsong, Gu Honggang, Chen Xiuguo, Jiang Hao, Liu Shiyuan. Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence[J]. International Journal of Extreme Manufacturing, 2025, 7(1): 15601
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Received: Feb. 29, 2024
Accepted: Apr. 17, 2025
Published Online: Apr. 17, 2025
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