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Liu Jiamin, Zhu Jinlong, Yu Zhe, Feng Xianrui, Li Zedi, Zhong Lei, Zhang Jinsong, Gu Honggang, Chen Xiuguo, Jiang Hao, Liu Shiyuan. Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence[J]. International Journal of Extreme Manufacturing, 2025, 7(1): 15601