Fig. 1. Equivalent diagram of X-Y direction flexible adjustment mechanism

Fig. 2. Round notch flexible hinge

Fig. 3. Schematic diagram of micro-movement mechanism in X-Y direction

Fig. 4. Three-dimensional model of X-Y direction flexible adjustment mechanism

Fig. 5. Finite element calculation model

Fig. 6. Relationship between F_X and displacement

Fig. 7. Relationship between F_Y and displacement

Fig. 8. Natural vibration modes of X-Y flexible micro adjustment mechanism. (a) First mode; (b) second mode; (c) third mode; (d) fourth mode; (e) fifth mode; (f) sixth mode

Fig. 9. Experimental device diagram of X-Y direction adjusting mechanism performance test

Fig. 10. Schematic diagram of X/Y reciprocating motion process

Fig. 11. Test results of repeated positioning accuracy of X-direction drive. (a) P₁ point; (b) P₂ point; (c) P₃ point; (d) P₄ point; (e) P₅ point; (f) P₆ point

Fig. 12. Test results of repeated positioning accuracy of Y-direction drive. (a) P₁ point; (b) P₂ point; (c) P₃ point; (d) P₄ point; (e) P₅ point; (f) P₆ point

Fig. 13. Test resultsof X,Y direction full stroke drive offset angle. (a) X direction angular offset measurement value; (b) Y direction angular offset measurement value