Design of <i>X-Y</i> Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective

Chao Yang; Xianchang Zhu; Chuan Jin; Song Hu

doi:10.3788/LOP202259.0411002

Laser & Optoelectronics Progress, Volume. 59, Issue 4, 0411002(2022)

Design of X-Y Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective

Chao Yang^1,2, Xianchang Zhu¹, Chuan Jin^1,2, and Song Hu^1、*

¹State Key Laboratory of Optical Technologies for Micro-Fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu , Sichuan 610209, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Chao Yang, Xianchang Zhu, Chuan Jin, Song Hu. Design of X-Y Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective[J]. Laser & Optoelectronics Progress, 2022, 59(4): 0411002

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Paper Information

Category: Imaging Systems

Received: Feb. 5, 2021

Accepted: Apr. 13, 2021

Published Online: Jan. 25, 2022

The Author Email: Song Hu (husong@ioe.ac.cn)

DOI:10.3788/LOP202259.0411002

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology