OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 18, Issue 3, 17(2020)
A Single Pulse Energy Detecting Method for ArF Excimer Laser Based on Dark Field Noise Cancellation
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YANG Lei, CAO Yi-ping. A Single Pulse Energy Detecting Method for ArF Excimer Laser Based on Dark Field Noise Cancellation[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2020, 18(3): 17
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Received: Sep. 4, 2019
Accepted: --
Published Online: Jun. 18, 2020
The Author Email: Lei YANG (1239961296@qq.com)
CSTR:32186.14.
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