Optimization of Laser Ablation Process of Epoxy Resin by Response Surface Methodology

Guanqiang Wang; Zhenyuan Lin; Weigao Sun; Lingfei Ji

doi:10.3788/CJL240520

Chinese Journal of Lasers, Volume. 51, Issue 24, 2402202(2024)

Optimization of Laser Ablation Process of Epoxy Resin by Response Surface Methodology

Guanqiang Wang^1,2,3, Zhenyuan Lin^1,2,3, Weigao Sun^1,2,3, and Lingfei Ji^1,2,3、*

Author Affiliations

¹School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China

²Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing University of Technology, Beijing 100124, China

³Beijing Engineering Research Center of Laser Applied Technology, Beijing 100124, China

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Abstract Get PDF(in Chinese)

Figures & Tables(12)

Fig. 1. Schematic of laser scanning path and scanning spacing

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Fig. 2. Morphologies of epoxy resin after single scan. (a)(d) Laser confocal microscope images; (b)(e) three-dimensional morphologies; (c)(f) sections

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Fig. 3. Interaction effects of different process parameters on removal rate

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Fig. 4. Interaction effects of different process parameters on roughness

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Fig. 5. SEM images of ceramic component surfaces in electronic device before and after optimization of process parameters. (a) Before process optimization; (b) after process optimization

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Fig. 6. AFM morphologies and DMT moduli of electronic components after laser removal of epoxy resin

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Table 1. Process parameter combination matrix and test values

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Table 1. Process parameter combination matrix and test values

Factor			Response
A / （J/cm²）	B / （mm/s）	C /μm	Removal rate /（μm³/s）	Roughness / μm
11.5	133	2.0	2042.72	11.9
11.8	160	1.5	1996.78	10.0
12.1	200	2.0	1974.62	11.3
11.8	160	2.5	1862.22	9.8
10.9	160	2.0	1765.66	7.2
11.2	240	1.5	1627.68	8.0
11.2	160	2.5	1526.42	7.0
11.8	240	1.5	1499.09	7.1
11.5	200	2.0	1496.54	5.3
11.5	200	2.0	1496.03	5.8
11.5	200	2.0	1486.24	5.9
11.5	200	1.2	1432.34	7.0
11.2	160	1.5	1431.23	7.4
11.5	200	2.0	1423.76	6.3
11.5	200	2.0	1402.99	5.4
11.5	200	2.0	1354.78	5.4
11.5	267	2.0	1342.56	6.1
11.2	240	2.5	1224.65	6.1
11.5	200	2.8	976.38	4.7
11.2	240	2.5	870.98	4.5

Table 2. Analysis of variance for remove rate model

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Table 2. Analysis of variance for remove rate model

Source	Sum of squares	Degree of freedom	Mean square	F-value	P-value	Reliability
Model	1.753×10⁶	9	1.948×10⁵	42.81	0.0001	Significant
A	43470.770	1	43470.770	9.55	0.0001
B	5.626×10⁵	1	5.626×10⁵	123.60	0.0001
C	2.472×10⁵	1	2.472×10⁵	54.31	0.0114
AB	2.393×10⁵	1	2.393×10⁵	52.58	0.0001
AC	25858.220	1	25858.220	5.68	0.0384
BC	1.230×10⁵	1	1.230×10⁵	27.02	0.0004
A²	2.483×10⁵	1	2.483×10⁵	54.55	0.0001
B²	67617.020	1	67617.020	14.86	0.0032
C²	1.563×10⁵	1	1.563×10⁵	34.34	0.0002
Residual	45512.530	10	4551.250
Lack of fit value	28211.280	5	5642.260	1.63	0.3023	Not significant
Pure error	17301.240	5	3460.250
Total	1.799×10⁶	19
R²=0.9747， $R_{A D J}^{2}$ =0.9519
$R_{P R E D}^{2}$ =0.8678， signal-to-noise ratio of 23.7844

Table 3. Analysis of variance for roughness model

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Table 3. Analysis of variance for roughness model

Source	Sum of squares	Degree of freedom	Mean square	F-value	P-value	Reliability
Model	82.5200	9	9.1700	41.2400	0.0001	Significant
A	15.0400	1	15.0400	67.6400	0.0001
B	15.2300	1	15.2300	68.4800	0.0001
C	0.0036	1	0.0036	0.0162	0.9011
AB	1.4500	1	1.4500	6.5300	0.0286
AC	0.0011	1	0.0011	0.0051	0.9446
BC	0.0193	1	0.0193	0.0868	0.7743
A²	19.0200	1	19.0200	85.5300	0.0001
B²	28.4300	1	28.4300	127.8500	0.0001
C²	3.4000	1	3.4000	15.3100	0.0029
Residual	2.2200	10	0.2223
Lack of fit value	1.4000	5	0.2791	1.6900	0.2902	Not significant
Pure error	0.8278	5	0.1656
Total	84.7500	19
R²=0.9738， $R_{A D J}^{2}$ =0.9502
$R_{P R E D}^{2}$ =0.8613， signal-to-noise ratio of 21.4443

Table 4. Optimization criteria of process parameters

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Table 4. Optimization criteria of process parameters

Parameter	Limit		Importance	Criterion
Parameter	Lower	Upper	Importance	Criterion
Laser fluence /（J/cm²）	11.20	11.80	3	In range
Scanning speed /（mm/s）	160	240	3	In range
Scanning spacing /μm	1.50	2.50	3	In range
Removal rate /（μm³/s）	870.98	2042.72	5	Maximization
Roughness /μm	4.5	11.9	5	Maximization

Table 5. Optimization results

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Table 5. Optimization results

No.	Laser fluence / （J/cm²）	Scanning speed / （mm/s）	Scanning spacing / μm	Removal rate / （μm³/s）	Roughness /μm	Desirability
1	11.20	234.11	1.50	1624.72	5.8	0.730
2	11.20	233.79	1.50	1623.00	5.8	0.730
3	11.20	234.70	1.50	1627.82	5.8	0.730
4	11.20	235.01	1.50	1629.49	5.8	0.730
5	11.20	233.46	1.50	1620.90	5.8	0.730
6	11.20	235.63	1.50	1632.81	5.8	0.730
7	11.20	232.86	1.50	1617.88	5.7	0.730
8	11.20	230.04	1.50	1603.98	5.6	0.729
9	11.20	233.97	1.51	1624.51	5.8	0.729
10	11.21	234.06	1.50	1615.22	5.7	0.728
11	11.20	239.61	1.50	1655.00	6.0	0.728
12	11.21	231.96	1.51	1607.84	5.7	0.728
13	11.20	230.07	1.53	1606.04	5.7	0.726
14	11.22	231.73	1.50	1595.04	5.6	0.726
15	11.20	224.34	1.50	1577.32	5.4	0.725
16	11.20	233.45	1.55	1622.88	5.8	0.725
17	11.20	230.65	1.55	1609.54	5.7	0.725
18	11.24	236.48	1.50	1600.84	5.7	0.723
19	11.20	240.00	1.55	1656.72	6.2	0.721
20	11.28	230.41	1.50	1543.33	5.3	0.715

Table 6. Elemental analysis of ceramic component surfaces before and after laser processing
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Table 6. Elemental analysis of ceramic component surfaces before and after laser processing
Element Mass fraction before parameter optimization /% Mass fraction after parameter optimization /%
O 51.9 48.0
Zr 36.2 32.4
Ca 8.3 7.5
P 3.6 3.2
C ‒ 8.9

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Guanqiang Wang, Zhenyuan Lin, Weigao Sun, Lingfei Ji. Optimization of Laser Ablation Process of Epoxy Resin by Response Surface Methodology[J]. Chinese Journal of Lasers, 2024, 51(24): 2402202

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