Journal of Applied Optics, Volume. 46, Issue 2, 372(2025)
Design of ellipsometry parametric stable measurement system based on double-elastic light
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Haojie GUO, Rui ZHANG, Peng XUE, Chengyu XU, Jianning LYU, Zhibin WANG. Design of ellipsometry parametric stable measurement system based on double-elastic light[J]. Journal of Applied Optics, 2025, 46(2): 372
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Received: May. 23, 2024
Accepted: --
Published Online: May. 13, 2025
The Author Email: Rui ZHANG (张瑞)