Journal of Applied Optics, Volume. 46, Issue 2, 372(2025)

Design of ellipsometry parametric stable measurement system based on double-elastic light

Haojie GUO1,2, Rui ZHANG1,2、*, Peng XUE2,3, Chengyu XU1,2, Jianning LYU1,2, and Zhibin WANG2,4
Author Affiliations
  • 1School of Information and Communication Engineering, North University of China, Taiyuan 030051, China
  • 2Engineering and Technology Research Center of Shanxi Provincial for Optical-Electric Information and Instrument, North University of China, Taiyuan 030051, China
  • 3School of Electrical and Control Engineering, North University of China, Taiyuan 030051, China
  • 4School of Instrument and Electronics, North University of China, Taiyuan 030051, China
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    References(23)

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    Haojie GUO, Rui ZHANG, Peng XUE, Chengyu XU, Jianning LYU, Zhibin WANG. Design of ellipsometry parametric stable measurement system based on double-elastic light[J]. Journal of Applied Optics, 2025, 46(2): 372

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    Paper Information

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    Received: May. 23, 2024

    Accepted: --

    Published Online: May. 13, 2025

    The Author Email: Rui ZHANG (张瑞)

    DOI:10.5768/JAO202546.0203002

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