Journal of Synthetic Crystals, Volume. 54, Issue 1, 11(2025)

High Rate HVPE Growth of High Uniformity 6-Inch GaN Thick Film

XU Wanli, GAN Yunhai, LI Yuewen, LI Bin, ZHENG Youdou, ZHANG Rong, and XIU Xiangqian*
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  • School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
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    XU Wanli, GAN Yunhai, LI Yuewen, LI Bin, ZHENG Youdou, ZHANG Rong, XIU Xiangqian. High Rate HVPE Growth of High Uniformity 6-Inch GaN Thick Film[J]. Journal of Synthetic Crystals, 2025, 54(1): 11

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    Paper Information

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    Received: Sep. 20, 2024

    Accepted: Feb. 18, 2025

    Published Online: Feb. 18, 2025

    The Author Email: XIU Xiangqian (xqxiu@nju.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0227

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