Chinese Journal of Lasers, Volume. 44, Issue 4, 402003(2017)
Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire
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Luo Zhiliang, Xie Xiaozhu, Wei Xin, Hu Wei, Ren Qinglei, Jiang Wei. Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire[J]. Chinese Journal of Lasers, 2017, 44(4): 402003
Paper Information
Category: laser manufacturing
Received: Nov. 16, 2016
Accepted: --
Published Online: Apr. 10, 2017
The Author Email: Zhiliang Luo (1157740692@qq.com)
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