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Chinese Journal of Lasers, Volume. 44, Issue 4, 402003(2017)

Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire

Luo Zhiliang*, Xie Xiaozhu, Wei Xin, Hu Wei, Ren Qinglei, and Jiang Wei
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    Article index updated: Sep. 6, 2025

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    Luo Zhiliang, Xie Xiaozhu, Wei Xin, Hu Wei, Ren Qinglei, Jiang Wei. Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire[J]. Chinese Journal of Lasers, 2017, 44(4): 402003

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    Paper Information

    Category: laser manufacturing

    Received: Nov. 16, 2016

    Accepted: --

    Published Online: Apr. 10, 2017

    The Author Email: Luo Zhiliang (1157740692@qq.com)

    DOI:10.3788/cjl201744.0402003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology