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Acta Optica Sinica, Volume. 43, Issue 13, 1312001(2023)

Wavefront Aberration Measurement Technique Based on Principal Component Analysis of Aerial Image for Lithographic Projection Lens

Wei Lei1,2, Sikun Li1,2,3、*, Dongchao Pan1,2, Yipeng Jiang1,2, Tong Tong1,3, Xiangzhao Wang1,4、**, and Yang Bu1
Author Affiliations
  • 1Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Department of Microelectronics, Shanghai University, Shanghai 200444, China
  • 4State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (23)
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    References (23)
    Cited By (2)
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    Figures & Tables(23)
    Schematic diagram of optical structure of a lithographic projection system

    Fig. 1. Schematic diagram of optical structure of a lithographic projection system

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    Flow chart of AMAI-PCA technology

    Fig. 2. Flow chart of AMAI-PCA technology

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    Diagram of aerial image and its acquisition. (a) Scanning method of aerial image; (b) simulated aerial image

    Fig. 3. Diagram of aerial image and its acquisition. (a) Scanning method of aerial image; (b) simulated aerial image

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    Diagram of sensor construction

    Fig. 4. Diagram of sensor construction

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    Diagram of aerial image offset

    Fig. 5. Diagram of aerial image offset

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    Influence of different factors on wavefront aberration measurement accuracy. (a) Partial coherence; (b) CD; (c) NA; (d) length of sampling length along X/Y; (e) length of sampling length along Z

    Fig. 6. Influence of different factors on wavefront aberration measurement accuracy. (a) Partial coherence; (b) CD; (c) NA; (d) length of sampling length along X/Y; (e) length of sampling length along Z

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    Solving results of sensor under different widths

    Fig. 7. Solving results of sensor under different widths

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    Experimental results of aerial image reconstruction without sensor. (a) Measured aerial image; (b) reconstructed aerial image; (c) aerial image residual

    Fig. 8. Experimental results of aerial image reconstruction without sensor. (a) Measured aerial image; (b) reconstructed aerial image; (c) aerial image residual

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    Experimental results of aerial image reconstruction with sensor. (a) Measured aerial image; (b) reconstructed aerial image; (c) aerial image residual

    Fig. 9. Experimental results of aerial image reconstruction with sensor. (a) Measured aerial image; (b) reconstructed aerial image; (c) aerial image residual

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    Influence of centering error on wavefront aberration measurement accuracy. (a) X direction; (b) F direction

    Fig. 10. Influence of centering error on wavefront aberration measurement accuracy. (a) X direction; (b) F direction

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    Centering accuracy comparison of three-term model and six-term model. (a) X direction; (b) F direction

    Fig. 11. Centering accuracy comparison of three-term model and six-term model. (a) X direction; (b) F direction

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    Experimental results of aerial image reconstruction before centering. (a) Measured aerial image; (b) reconstructed aerial image; (c) aerial image residual

    Fig. 12. Experimental results of aerial image reconstruction before centering. (a) Measured aerial image; (b) reconstructed aerial image; (c) aerial image residual

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    Experimental results of aerial image reconstruction after centering. (a) Measured aerial image; (b) reconstructed aerial image; (c) aerial image residual

    Fig. 13. Experimental results of aerial image reconstruction after centering. (a) Measured aerial image; (b) reconstructed aerial image; (c) aerial image residual

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    Experimental results of two sensors before centering. (a) Measured aerial image of sensor 1; (b) measured aerial image of sensor 2; (c) aerial image residual

    Fig. 14. Experimental results of two sensors before centering. (a) Measured aerial image of sensor 1; (b) measured aerial image of sensor 2; (c) aerial image residual

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    Experimental results of two sensors after centering. (a) Measured aerial image of sensor 1; (b) measured aerial image of sensor 2; (c) aerial image residual

    Fig. 15. Experimental results of two sensors after centering. (a) Measured aerial image of sensor 1; (b) measured aerial image of sensor 2; (c) aerial image residual

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    Diagram of aerial image. (a) Aerial image without noise; (b) aerial image with noise

    Fig. 16. Diagram of aerial image. (a) Aerial image without noise; (b) aerial image with noise

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    Standard deviation image of noise

    Fig. 17. Standard deviation image of noise

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    Contour diagram and solving accuracy of spatial filtering. (a) Contour diagram; (b) solving accuracy

    Fig. 18. Contour diagram and solving accuracy of spatial filtering. (a) Contour diagram; (b) solving accuracy

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    Contour diagram and solving accuracy of frequency filtering. (a) Contour diagram; (b) solving accuracy

    Fig. 19. Contour diagram and solving accuracy of frequency filtering. (a) Contour diagram; (b) solving accuracy

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    Noise reduction effects with different aerial image numbers

    Fig. 20. Noise reduction effects with different aerial image numbers

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    Measurement result of aberration drift. (a) Drift; (b) error of drift

    Fig. 21. Measurement result of aberration drift. (a) Drift; (b) error of drift

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    • Table 1. Simulation settings

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      Table 1. Simulation settings

      Simulation parameterNumerical value
      Wavelength λ /nm248
      Partial coherence σ0.65
      NA0.75
      CD /nm250
      Zernike coefficients range mλ-20-20
      Length of aerial image along X （Y）/nm1800
      Length of aerial image along Z /nm7000
      Sampling number along X（Y）61
      Sampling number along Z57

    • Table 2. Variable settings

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      Table 2. Variable settings

      VariableRange of numerical value
      Partial coherence σ0.35-0.95
      NA0.55-0.90
      CD /nm200-300
      Length of aerial image along X（Y）/nm900-1800
      Length of aerial image along Z /nm3000-7000
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    Wei Lei, Sikun Li, Dongchao Pan, Yipeng Jiang, Tong Tong, Xiangzhao Wang, Yang Bu. Wavefront Aberration Measurement Technique Based on Principal Component Analysis of Aerial Image for Lithographic Projection Lens[J]. Acta Optica Sinica, 2023, 43(13): 1312001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 11, 2023

    Accepted: Feb. 23, 2023

    Published Online: Jul. 12, 2023

    The Author Email: Li Sikun (lisikun@siom.ac.cn), Wang Xiangzhao (wxz26267@siom.ac.cn)

    DOI:10.3788/AOS230464

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology