Wavefront Aberration Measurement Technique Based on Principal Component Analysis of Aerial Image for Lithographic Projection Lens

Wei Lei; Sikun Li; Dongchao Pan; Yipeng Jiang; Tong Tong; Xiangzhao Wang; Yang Bu

doi:10.3788/AOS230464

Acta Optica Sinica, Volume. 43, Issue 13, 1312001(2023)

Wavefront Aberration Measurement Technique Based on Principal Component Analysis of Aerial Image for Lithographic Projection Lens

Wei Lei^1,2, Sikun Li^1,2,3、*, Dongchao Pan^1,2, Yipeng Jiang^1,2, Tong Tong^1,3, Xiangzhao Wang^1,4、**, and Yang Bu¹

Author Affiliations

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Department of Microelectronics, Shanghai University, Shanghai 200444, China

⁴State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang, China

show less

Abstract Get PDF(in Chinese)

Cited By

Article index updated: Mar. 10, 2025

The article is cited by 2 article(s) CLP online library. (Some content might be in Chinese.)

Tools

Get Citation

Copy Citation Text

Wei Lei, Sikun Li, Dongchao Pan, Yipeng Jiang, Tong Tong, Xiangzhao Wang, Yang Bu. Wavefront Aberration Measurement Technique Based on Principal Component Analysis of Aerial Image for Lithographic Projection Lens[J]. Acta Optica Sinica, 2023, 43(13): 1312001

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jan. 11, 2023

Accepted: Feb. 23, 2023

Published Online: Jul. 12, 2023

The Author Email: Li Sikun (lisikun@siom.ac.cn), Wang Xiangzhao (wxz26267@siom.ac.cn)

DOI:10.3788/AOS230464

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology