Optics and Precision Engineering, Volume. 33, Issue 1, 25(2025)

Development of collimated focus coupled optical path for film thickness monitoring system

Haifeng XIE1,2, Xiuhua FU1,2、*, Suotao DONG2,4, Peng SHI3, Songlin REN4, Xin DU1,2, and Youde WANG1,2
Author Affiliations
  • 1College of Optoelectronic Engineering, Changchun University of Science and Technology, Chang chun30022, China
  • 2Zhongshan Institute of Changchun University of Science and Technology, Zhongshan58436, China
  • 3Zhongshan Torch Polytechnic, Zhongshan52846, China
  • 4Guangdong Changli Jingxun Optoelectronics Technology Co., Zhongshan52836, China
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    Haifeng XIE, Xiuhua FU, Suotao DONG, Peng SHI, Songlin REN, Xin DU, Youde WANG. Development of collimated focus coupled optical path for film thickness monitoring system[J]. Optics and Precision Engineering, 2025, 33(1): 25

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    Paper Information

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    Received: Aug. 13, 2024

    Accepted: --

    Published Online: Apr. 1, 2025

    The Author Email: Xiuhua FU (goptics@126.com)

    DOI:10.37188/OPE.20253301.0025

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