Optics and Precision Engineering, Volume. 33, Issue 1, 25(2025)
Development of collimated focus coupled optical path for film thickness monitoring system
Figures & Tables(20)
Fig. 1. Variation of transmittance of different dielectric thin films with optical thickness
Fig. 2. Schematic diagram of direct optical film thickness monitoring system
Fig. 3. Schematic diagrams of workpiece disc opening and modulated signal sampling
Fig. 4. Schematic diagram of collimated focus-coupled optical path system
Fig. 9. Radiation intensity and energy profiles of independent light source on substrate and optical fiber receiving terminal， respectively
Fig. 10. Profiles of radiation intensity and energy on substrate and optical fiber receiving terminals before optimization， respectively
Fig. 11. Optimized radiation intensity and energy profiles on substrate and optical fiber receiving terminals， respectively
Table 1. Parameters of collimated focus coupled optical path system
View tableView in ArticleTable 1. Parameters of collimated focus coupled optical path system
系统参数 数值 基板光斑直径/mm 10 光纤受光端子直径/mm 2 光纤数值孔径角 0.22 聚焦透镜通光孔径/mm ≤50 系统总长/mm 370≤L0≤470 光源-基板距离/mm 20≤L1≤50 光源准直结构最大尺寸
（长×宽×高）/mm3
≤60×60×60
Table 2. Initial structural parameters of reflector
View tableView in ArticleTable 2. Initial structural parameters of reflector
材 质 口径/mm 高度/mm 抛物线方程 紫外熔石英 30 14
Table 3. Initial structural parameters of focusing lens
View tableView in ArticleTable 3. Initial structural parameters of focusing lens
材 质 直径 曲率半径 中心厚度 焦距 紫外熔石英 25.4 56 3.96 61.8
Table 4. Optimized design of structural parameters of optical path system
View tableView in ArticleTable 4. Optimized design of structural parameters of optical path system
结构参数 反光杯 聚焦透镜 曲率半径/mm 15 23.41 厚度/mm 2 10.97 材质 Mirror BK7 1阶项 1.20×10-1 2阶项 1.85×10-2 9.71×10-4 3阶项 1.37×10-3 4阶项 2.00×10-4 6.67×10-5
Table 5. Irradiation intensity and spot size on substrate and fiber receiving end
View tableView in ArticleTable 5. Irradiation intensity and spot size on substrate and fiber receiving end
参 数 独立光源 优化前 优化后 基板辐照度/W 3.08×10-3 1.82×10-1 4.53×10-1 光纤接收端辐照度/W 0 6.97×10-3 1.53×10-2 基板光斑尺寸/mm 12.5 12 10.7 光纤接收端光斑尺寸/mm 0 0.84 0.64
Table 6. Assembly error analysis simulation results table
View tableView in ArticleTable 6. Assembly error analysis simulation results table
部 件 公差 基板辐照
强度/%
光纤接收端辐照强度/% 反光杯
Z轴偏差：+0.5 mm 41.62 1.72 Z轴偏差：-0.5 mm 41.68 1.17 Y轴角度偏差：±0.5° 45.19 1.51 Y轴偏差：+0.5 mm 44.30 1.64 Y轴偏差：-0.5 mm 43.03 1.25 X轴偏差：±0.5 mm 44.30 1.64 会聚
透镜
Z轴偏差：+0.5 mm 45.33 1.43 Z轴偏差：-0.5 mm 45.33 1.49 Y轴角度偏差：±0.5° 45.37 1.51 Y轴偏差：+0.5 mm 45.37 1.56 Y轴偏差：-0.5 mm 45.37 1.50 X轴偏差：+0.5 mm 45.37 1.55 X轴偏差：-0.5 mm 45.37 1.52 光纤
端面
Z轴偏差：+0.5 mm 45.37 1.49 Z轴偏差：-0.5 mm 45.37 1.43 Y轴偏差：±1° 45.37 1.53 X轴偏差：+0.5 mm 45.37 1.01 X轴偏差：-0.5 mm 45.37 1.13 Y轴偏差：+0.5 mm 45.37 1.01 Y轴偏差：-0.5 mm 45.37 1.13
Table 7. Measured light values of installation components
View tableView in ArticleTable 7. Measured light values of installation components
部 件 系统光量值/V 独立光源 0.209 单独反光杯结构 2.935 准直聚焦耦合光路 7.601
Table 8. Ion source process parameters
View tableView in ArticleTable 8. Ion source process parameters
材料 Beam电压/V ACC电压/V Beam电流/mA gas 1 gas 2 gas 3 Clear 700 600 700 40 5 8 Ta2O5 1 150 600 950 50 0 8 SiO2 1 100 600 950 40 0 8
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Haifeng XIE, Xiuhua FU, Suotao DONG, Peng SHI, Songlin REN, Xin DU, Youde WANG. Development of collimated focus coupled optical path for film thickness monitoring system[J]. Optics and Precision Engineering, 2025, 33(1): 25
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Received: Aug. 13, 2024
Accepted: --
Published Online: Apr. 1, 2025
The Author Email: Xiuhua FU (goptics@126.com)
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