Infrared and Laser Engineering, Volume. 44, Issue 10, 2987(2015)
Design of three DOFs flexure support for FSM driven by piezoelectric ceramics
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Fang Chu, Guo Jin, Xu Xinhang, Wang Tingfeng. Design of three DOFs flexure support for FSM driven by piezoelectric ceramics[J]. Infrared and Laser Engineering, 2015, 44(10): 2987
Category: 光电器件与材料
Received: Feb. 5, 2015
Accepted: Mar. 10, 2015
Published Online: Jan. 26, 2016
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CSTR:32186.14.