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Infrared and Laser Engineering, Volume. 44, Issue 10, 2987(2015)

Design of three DOFs flexure support for FSM driven by piezoelectric ceramics

Fang Chu1,2,3, Guo Jin1,2, Xu Xinhang1,3, and Wang Tingfeng1,2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Fang Chu, Guo Jin, Xu Xinhang, Wang Tingfeng. Design of three DOFs flexure support for FSM driven by piezoelectric ceramics[J]. Infrared and Laser Engineering, 2015, 44(10): 2987

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    Paper Information

    Category: 光电器件与材料

    Received: Feb. 5, 2015

    Accepted: Mar. 10, 2015

    Published Online: Jan. 26, 2016

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology