Acta Optica Sinica, Volume. 26, Issue 5, 767(2006)
Controlling the Duty Cycle of Photoresist Gratings by Setting the Guided-Wave Coupling Angles in Monitoring of Photoresist Development
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[in Chinese], [in Chinese], [in Chinese]. Controlling the Duty Cycle of Photoresist Gratings by Setting the Guided-Wave Coupling Angles in Monitoring of Photoresist Development[J]. Acta Optica Sinica, 2006, 26(5): 767
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