Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings

LIN Yu-hua; HE Ming-xia; LAI Hui-bin; LI Peng-fei; MA Wen-he

doi:10.3964/j.issn.1000-0593(2017)11-3332-06

Spectroscopy and Spectral Analysis, Volume. 37, Issue 11, 3332(2017)

Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings

LIN Yu-hua^1,2、*, HE Ming-xia^1,2, LAI Hui-bin^1,2, LI Peng-fei^1,2, and MA Wen-he^1,2

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

References(7)

[3] [3] May R K, Su K, Han L, et al. J. Pharm. Sci., 2013, 102(7): 2179.

[4] [4] Trofimov V A, Varentsova S A. Sensors, 2015, 15(6): 12103.

[5] [5] Sleiman J B, Bousquet B, Palka N. Applied Spectroscopy, 2015, 69(12): 1464.

[6] [6] Iwata T, Uemura H, Mizutani Y, et al. Optics Express, 2014, 22(17): 20595.

[7] [7] Uemura H, Yasui T, Lwata T, et al. Optics Express, 2014, 22(17): 20595.

[8] [8] Iwata T, Yoshioka S, Nakamura S, et al. Journal of Infrared Millimeter & Terahertz Waves, 2013, 34(10): 646.

[9] [9] Su K, Shen Y C, Zeitler J A. IEEE Transactions on Terahertz Science & Technology, 2014, 4(4): 432.

Tools

Get Citation

Copy Citation Text

LIN Yu-hua, HE Ming-xia, LAI Hui-bin, LI Peng-fei, MA Wen-he. Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings[J]. Spectroscopy and Spectral Analysis, 2017, 37(11): 3332

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Received: Apr. 13, 2016

Accepted: --

Published Online: Jan. 4, 2018

The Author Email: Yu-hua LIN (529446991@qq.com)

DOI:10.3964/j.issn.1000-0593(2017)11-3332-06

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology