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Spectroscopy and Spectral Analysis, Volume. 37, Issue 11, 3332(2017)

Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings

LIN Yu-hua1,2、*, HE Ming-xia1,2, LAI Hui-bin1,2, LI Peng-fei1,2, and MA Wen-he1,2
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    LIN Yu-hua, HE Ming-xia, LAI Hui-bin, LI Peng-fei, MA Wen-he. Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings[J]. Spectroscopy and Spectral Analysis, 2017, 37(11): 3332

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    Paper Information

    Received: Apr. 13, 2016

    Accepted: --

    Published Online: Jan. 4, 2018

    The Author Email: Yu-hua LIN (529446991@qq.com)

    DOI:10.3964/j.issn.1000-0593(2017)11-3332-06

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology