Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Laser & Optoelectronics Progress, Volume. 55, Issue 4, 043101(2018)

Stress Simulation Analysis of Multilayer Film Deposition

Chang'an Li*, Mingdong Yang, Benqing Quan, and Weilin Guan
Author Affiliations
  • Accelink Technologies Co., Ltd, Wuhan, Hubei 430205, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (8)
    Equations (0)
    References (14)
    Cited By (5)
    Tools
    Paper Information
    Topics
    Cited By

    Article index updated: Sep. 14, 2025

    The article is cited by 5 article(s) CLP online library. (Some content might be in Chinese.)
    Tools

    Get Citation

    Copy Citation Text

    Chang'an Li, Mingdong Yang, Benqing Quan, Weilin Guan. Stress Simulation Analysis of Multilayer Film Deposition[J]. Laser & Optoelectronics Progress, 2018, 55(4): 043101

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Thin films

    Received: Aug. 22, 2017

    Accepted: --

    Published Online: Sep. 11, 2018

    The Author Email: Chang'an Li (lca1983@163.com)

    DOI:10.3788/LOP55.043101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology