Infrared and Laser Engineering, Volume. 51, Issue 9, 20220497(2022)

Virtual-real combination interferometry for aspheric surface parameter error measurement with cat-eye-wavefront positioning (invited)

Yao Hu, Xin Tao, and Qun Hao
Author Affiliations
  • Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
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    References(22)

    [1] Liang Zijian, Yang Yongying, Zhao Hongyang, et al. Advances in research and applications of optical aspheric surface metrology[J]. Chinese Optics, 15, 161-186(2022).

    [2] Chen Baohua, Wu Quanying, Tang Yunhai, et al. Processing method of large off-axis aspheric mirror[J]. Optics and Precision Engineering, 29, 1095-1102(2021).

    [3] [3] Malacara D. Optical Shop Testing[M]. 3rd ed. New Yk: WileyInterscience, 2006.

    [4] Wang Fengpu, Li Xinnan, Xu Chen, et al. Optical testing path design for LOT aspheric segmented mirrors with reflective-diffractive compensation[J]. Chinese Optics, 14, 1184-1193(2021).

    [5] Li Meixuan, Wang Li, Dong Lianhe, et al. Application of aspheric technique in immersion lithography lighting system[J]. Infrared and Laser Engineering, 46, 1118003(2017).

    [6] Zhang Chao, Xing Hui, Song Junru, et al. Measurement of optical axis eccentricity of a large-aperture concave ellipsoid mirror[J]. Infrared and Laser Engineering, 50, 20210196(2021).

    [7] Wang Xin, Liu Qiang, Shu Rong. Application of Schmidt optical system with wide-field of view and fast focal ratio to aerospace imaging spectrometer[J]. Optics and Precision Engineering, 27, 533-541(2019).

    [8] Lv Chenyang, Zhan Renjun, Cui Ying. Collimating lens design and aspheric optimization method of laser cauterization gun[J]. Infrared and Laser Engineering, 50, 20200219(2021).

    [9] Wang H, Li Y, Zeng L, et al. A simple ray tracing method for measuring the vertex radius of curvature of an aspheric mirror[J]. Optics Communications, 232, 61-68(2004).

    [10] Yang Y, Zhang L, Shi T, et al. Determination of aspheric vertex radius of curvature in non-null interferometry[J]. Applied Optics, 54, 2838-2844(2015).

    [11] Pi Y, Reardon P J. Determining parent radius and conic of an off-axis segment interferometrically with a spherical reference wave[J]. Optics Letters, 32, 1063-1065(2007).

    [12] Yang J, Qiu L, Zhao W, et al. Laser differential confocal paraboloidal vertex radius measurement[J]. Optics Letters, 39, 830-833(2014).

    [13] Díaz-Uribe R, Cornejo-Rodriguez A. Conic constant and paraxial radius of curvature measurements for conic surfaces[J]. Applied Optics, 25, 3731-3734(1986).

    [14] Mejía Y, Díaz-Uribe R, Pacheco A L, et al. Measuring conic constant and vertex radius of fast convex conic surfaces from a set of Hartmann patterns[J]. Optics Communications, 363, 166-175(2016).

    [15] Chen Xindong, Li Ruigang. Research on geometric parameter measurement method using laser tracker in null lens asphere testing[J]. Chinese Journal of Lasers, 42, 0508007(2015).

    [16] Xiong L, Qi E, Luo X, et al. Stitching swing arm profilometer test for large aperture aspherics[J]. Chinese Optics Letters, 17, 112201(2019).

    [17] [17] Wang Z, Qu W, Asundi A. A simplified expression f aspheric surface fitting [J]. Optik, 2017, 140: 291298.

    [18] Hao Q, Li T, Hu Y, et al. Vertex radius of curvature error measurement of aspheric surface based on slope asphericity in partial compensation interferometry[J]. Optics Express, 25, 18107-18121(2017).

    [19] [19] Hao Q, Li T, Hu Y. Partial compensation interferometry f measurement of surface parameter err of highder aspheric surfaces [C]2017 International Conference on Optical Instruments Technology: Optical Systems Modern Optoelectronic Instruments, 2018, 10616: 106160L.

    [20] Hao Q, Li T, Hu Y, et al. Partial compensation interferometry measurement system for parameter errors of conicoid surface[J]. Review of Scientific Instruments, 89, 063102(2018).

    [21] Hao Q, Tao X, Hu Y, et al. Interferometric measurement of high-order aspheric surface parameter errors based on virtual-real combination iterative algorithm[J]. Optics Express, 29, 27014-27030(2021).

    [22] Sha D, Quan S, Zhu Q, et al. Research on optical aspherical surface’s fitting method[J]. Acta Photonica Sinica, 24, 152-157(1995).

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    Yao Hu, Xin Tao, Qun Hao. Virtual-real combination interferometry for aspheric surface parameter error measurement with cat-eye-wavefront positioning (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220497

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Jul. 20, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20220497

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