Infrared and Laser Engineering, Volume. 51, Issue 9, 20220497(2022)
Virtual-real combination interferometry for aspheric surface parameter error measurement with cat-eye-wavefront positioning (invited)
Figures & Tables(13)
Fig. 1. Virtual-Real partial compensation interferometry system based on cat-eye-wavefront positioning. PC: partial compensator; SUT: surface under test; CL: convergent lens
Fig. 4. Residual wavefront and deviation. (a) Real compensation wavefront; (b) Initial virtual compensation wavefront; (c) Deviation between the real and initial virtual compensation wavefront; (d) Rotationally symmetric component of the deviation
Fig. 7. Residual error in virtual-real combination interferometer. (a) real compensation wavefront; (b) optimized virtual compensation wavefront; (c) deviation between the real and optimized virtual compensation wavefront; (d) rotationally symmetric component of the deviation
Table 1. Nominal parameters of SUT
View tableView in ArticleTable 1. Nominal parameters of SUT
Parameter R/mm K A4 Designed value 35.8256 −0.6291 1.4398×10−7
Table 2. Designed parameters of PC
View tableView in ArticleTable 2. Designed parameters of PC
Surface 1 2 3 Radius/mm 58.86 −41.54 −1074.58 Thickness/mm 15.3 20 — Aperture/mm 46 50.8 — Glass ZF4 ZF7 —
Table 3. Parameters of CL
View tableView in ArticleTable 3. Parameters of CL
Surface 1 2 3 Radius/mm 92.233 −66.841 −196.175 Thickness/mm 4 2.5 — Aperture/mm 25.4 25.4 — Glass H-K9L H-ZF2 —
Table 4. Measured result of compensation distances
View tableView in ArticleTable 4. Measured result of compensation distances
No. l/mm dr/mm 1 45.1666 16.1898 2 45.1688 16.1904 3 45.1714 16.1910 4 45.1639 16.1892 5 45.1626 16.1888 6 45.1622 16.1887 7 45.1588 16.1879 8 45.1545 16.1868 9 45.1568 16.1874 10 45.1604 16.1883
Table 5. Calculated result of aspheric surface parameters
View tableView in ArticleTable 5. Calculated result of aspheric surface parameters
Parameter R/mm K A4 Real value by UA3P 35.7569 −0.6291 −4.741×10−7 Proposed method 35.7482 −0.6286 −4.883×10−7 Error −0.0083 0.0005 −1.42×10−8 Relative error 2.321‱ 7.948‱ 2.995%
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Yao Hu, Xin Tao, Qun Hao. Virtual-real combination interferometry for aspheric surface parameter error measurement with cat-eye-wavefront positioning (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220497
Paper Information
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Jul. 20, 2022
Accepted: --
Published Online: Jan. 6, 2023
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