Journal of Applied Optics, Volume. 46, Issue 4, 835(2025)

Ellipsometry measurement method based on dual elastic differential frequency modulation

Zhe ZHANG1,2, Kewu LI2, Zhibin WANG1,2、*, and Shuang WANG2
Author Affiliations
  • 1School of Instruments and Electronics, North University of China, Taiyuan 030051, China
  • 2Institute of Frontier Interdisciplinary Sciences, North University of China, Taiyuan 030051, China
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    [14] ZHAO Zhentang, LIN Tianxia, HUANG Zuohua, et al. The accurate measurement of phase retardation of the wave plate by a null ellipsometer[J]. Laser Journal, 33, 8-9(2012).

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    [17] LI Kewu. Research on ellipsometry technology based on fast axis adjustable elastic light modulation[D](2018).

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    Zhe ZHANG, Kewu LI, Zhibin WANG, Shuang WANG. Ellipsometry measurement method based on dual elastic differential frequency modulation[J]. Journal of Applied Optics, 2025, 46(4): 835

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    Paper Information

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    Received: Dec. 27, 2023

    Accepted: --

    Published Online: Sep. 16, 2025

    The Author Email: Zhibin WANG (王志斌)

    DOI:10.5768/JAO202546.0403003

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