Journal of Applied Optics, Volume. 46, Issue 4, 859(2025)

Microsecond ultra-high speed ellipsometry measurement technology based on differential evolutionary algorithm

Saifei WANG1,2, Rui ZHANG2,3、*, Peng XUE2,4, Chengyu XU2,3, and Zhibin WANG1,2
Author Affiliations
  • 1School of Instrument and Electronics, North University of China, Taiyuan 030051, China
  • 2Technology Innovation Center of Shanxi Provincial for Intelligent Microwave Photoelectric, North University of China, Taiyuan 030051, China
  • 3School of Information and Communication Engineering, North University of China, Taiyuan 030051, China
  • 4School of Electrical and Control Engineering, North University of China, Taiyuan 030051, China
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    Saifei WANG, Rui ZHANG, Peng XUE, Chengyu XU, Zhibin WANG. Microsecond ultra-high speed ellipsometry measurement technology based on differential evolutionary algorithm[J]. Journal of Applied Optics, 2025, 46(4): 859

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    Paper Information

    Category:

    Received: Feb. 26, 2025

    Accepted: --

    Published Online: Sep. 16, 2025

    The Author Email: Rui ZHANG (张瑞)

    DOI:10.5768/JAO202546.0403006

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