Journal of Applied Optics, Volume. 46, Issue 4, 859(2025)

Microsecond ultra-high speed ellipsometry measurement technology based on differential evolutionary algorithm

Saifei WANG1,2, Rui ZHANG2,3、*, Peng XUE2,4, Chengyu XU2,3, and Zhibin WANG1,2
Author Affiliations
  • 1School of Instrument and Electronics, North University of China, Taiyuan 030051, China
  • 2Technology Innovation Center of Shanxi Provincial for Intelligent Microwave Photoelectric, North University of China, Taiyuan 030051, China
  • 3School of Information and Communication Engineering, North University of China, Taiyuan 030051, China
  • 4School of Electrical and Control Engineering, North University of China, Taiyuan 030051, China
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    Figures & Tables(12)
    Photoelastic modulator
    Simulation diagram of 60 kHz elastic light modulator
    Simulation diagram of 100 kHz elastic light modulator
    Physical image of PEM
    Schematic diagram of optical system
    Iterative diagram of residual sum of squares
    Comparison diagram of theoretical light intensity and actual light intensity
    Time dependent variation of light intensity
    Measurement values of Mueller matrix elements
    • Table 1. Piezoelectric crystal parameters

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      Table 1. Piezoelectric crystal parameters

      参量属性
      ρ密度/kg·m−32 684
      S22柔顺系数/m2·N−114.4 544×10−12
    • Table 2. Photoelastic crystal parameters

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      Table 2. Photoelastic crystal parameters

      参量属性
      E杨氏模量/GP70
      v密度/kg·m−32 203
      ε泊松比0.17
    • Table 3. Geometric dimension parameters of PEM

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      Table 3. Geometric dimension parameters of PEM

      频率/kHz弹光晶体 直径/mm弹光晶体 厚度/mm压电晶体 长度/mm压电晶体 宽度/mm压电晶体 高度/mm
      6047.7715.2042.8819.206.5
      10026.8813.8028.4014.804.0
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    Saifei WANG, Rui ZHANG, Peng XUE, Chengyu XU, Zhibin WANG. Microsecond ultra-high speed ellipsometry measurement technology based on differential evolutionary algorithm[J]. Journal of Applied Optics, 2025, 46(4): 859

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    Paper Information

    Category:

    Received: Feb. 26, 2025

    Accepted: --

    Published Online: Sep. 16, 2025

    The Author Email: Rui ZHANG (张瑞)

    DOI:10.5768/JAO202546.0403006

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