Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Journal of Optoelectronics · Laser, Volume. 36, Issue 1, 107(2025)

Effect and mechanism analysis of deposition temperature on the properties of aluminum nitride piezoelectric thin films

GUO Yan1、*, LIU Xiaojun1, and WANG Jin2
Author Affiliations
  • 1Taizhou Institute of Science and Technology, Nanjing University of Science and Technology, Taizhou, Jiangsu 225300, China
  • 2Tianjin Sanan Optoelectronics Co. , Ltd. , Tianjin 300450, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (11)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    GUO Yan, LIU Xiaojun, WANG Jin. Effect and mechanism analysis of deposition temperature on the properties of aluminum nitride piezoelectric thin films[J]. Journal of Optoelectronics · Laser, 2025, 36(1): 107

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Jun. 30, 2024

    Accepted: Jan. 23, 2025

    Published Online: Jan. 23, 2025

    The Author Email: GUO Yan (jiangsutaizhougy@163.com)

    DOI:10.16136/j.joel.2025.01.0372

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology