Fig. 1. Dual-channel imaging micro-interference measurement optical path

Fig. 2. Flow diagram of interference signal correction algorithm

Fig. 3. Comparison of interference data under ideal and vibration conditions. (a) Phase shift interval; (b) interference light intensity of white light interference signal

Fig. 4. White light interference light intensity curve before and after correction. (a) Before correction; (b) after correction

Fig. 5. Simulate results of step surface restoration. (a) Restoration result of step surface with vibration; (b) result of step surface restoration after correction by NUFFT algorithm; (c) one-dimensional contour of step faces; (d) deviation from one-dimensional contour of step face

Fig. 6. Simulate results of step surface restoration. (a) Restoration result of step surface with vibration; (b) result of step surface restoration after correction by NUFFT algorithm

Fig. 7. White light interferogram. (a) Complete white light interferogram; (b) white light interferogram of area near step face

Fig. 8. Quasi-monochromatic light interferogram processing results. (a) Phase shift interval; (b) phase shift interval deviation

Fig. 9. White light interference light intensity curve before and after correction. (a) Before correction; (b) after correction

Fig. 10. Reference results and NUFFT algorithm correction results. (a) Measurement result of Veeco interferometer; (b) step morphology calculated before correction; (c) step morphology calculated by NUFFT algorithm after correction ; (d) one-dimensional contour of step surface obtained by Veeco interferometer; (e) one-dimensional contour of step surface obtained after NUFFT algorithm correction