Anti-Vibration White Light Interferometry Based on Non-Uniform Fast Fourier Transform

Liang Xue; Renhui Guo; Yang Liu; Yu Qian; Jinwei Jiang; Jianxin Li

doi:10.3788/AOS231628

Acta Optica Sinica, Volume. 44, Issue 4, 0412006(2024)

Anti-Vibration White Light Interferometry Based on Non-Uniform Fast Fourier Transform

Liang Xue, Renhui Guo^*, Yang Liu, Yu Qian, Jinwei Jiang, and Jianxin Li

School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu , China

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Liang Xue, Renhui Guo, Yang Liu, Yu Qian, Jinwei Jiang, Jianxin Li. Anti-Vibration White Light Interferometry Based on Non-Uniform Fast Fourier Transform[J]. Acta Optica Sinica, 2024, 44(4): 0412006

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Oct. 9, 2023

Accepted: Dec. 13, 2023

Published Online: Feb. 27, 2024

The Author Email: Renhui Guo (grh@njust.edu.cn)

DOI:10.3788/AOS231628

CSTR:32393.14.AOS231628

Topics

laser devices and laser physics

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Instrumentation, Measurement and Metrology