Acta Optica Sinica, Volume. 42, Issue 1, 0114003(2022)
Quantum Well Intermixing of 915 nm InGaAsP/GaAsP Primary Epitaxial Wafers
[1] Liu C C, Lin N, Xiong C et al. Intermixing in InGaAs/AlGaAs quantum well structures induced by the interdiffusion of Si impurities[J]. Chinese Optics, 13, 203-216(2020).
[2] Henry C H, Petroff P M, Logan R A et al. Catastrophic damage of AlxGa1-xAs double-heterostructure laser material[J]. Journal of Applied Physics, 50, 3721-3732(1979).
[3] Tian W N, Xiong C, Wang X et al. Impurity-free vacancy diffusion induces intermixing in GaInP/AlGaInP quantum wells using GaAs encapsulation[J]. Chinese Journal of Luminescence, 39, 1095-1099(2018).
[4] Walker C L, Bryce A C, Marsh J H. Improved catastrophic optical damage level from laser with nonabsorbing mirrors[J]. IEEE Photonics Technology Letters, 14, 1394-1396(2002).
[5] Hempel M, Tomm J W, Ziegler M et al. Catastrophic optical damage at front and rear facets of diode lasers[J]. Applied Physics Letters, 97, 231101(2010).
[6] Yamada N, Roos G, Harris J S. Jr. Threshold reduction in strained InGaAs single quantum well lasers by rapid thermal annealing[J]. Applied Physics Letters, 59, 1040-1042(1991).
[7] Miao Z H, Xu Y Q, Zhang S Y et al. Effect of rapid thermal annealing on highly strained InGaAs/GaAs quantum well[J]. Chinese Journal of Semiconductors, 26, 1749-1752(2005).
[8] Li J J, Lin S J, He L J et al. Enhancement AlGaAs/InGaAs quantum well intermixing by the technology of cycles annealing[J]. Proceedings of SPIE, 9233, 91-97(2014).
[9] Zhi M, Fang X, Niu S Z et al. Effect of rapid thermal annealing on structural and luminescence properties of GaAs/AlGaAs quantum wells[J]. Laser & Optoelectronics Progress, 55, 051603(2018).
[10] Wang X, Zhao Y H, Zhu L N et al. Impurity-free vacancy diffusion induces quantum well intermixing in 915 nm semiconductor laser based on SiO2 film[J]. Acta Photonica Sinica, 47, 0314003(2018).
[11] Chang L L, Koma A. Interdiffusion between GaAs and AlAs[J]. Applied Physics Letters, 29, 138-141(1976).
[12] Kaliski R W, Gavrilovic P, Meehan K et al. Photoluminescence and stimulated emission in Si- and Ge-disordered AlxGa1-xAs-GaAs superlattices[J]. Journal of Applied Physics, 58, 101-107(1985).
[13] Yu J Z[M]. Semiconductor photonics(2015).
[14] Asano H, Wada M, Fukunaga T et al. Temperature-insensitive operation of real index guided 1.06 μm InGaAs/GaAsP strain-compensated single-quantum-well laser diodes[J]. Applied Physics Letters, 74, 3090-3092(1999).
[15] Lin T, Chen R G, Zhang H Q et al. Theoretical analysis of the inter-diffusion coefficients in the AlGaInP material quantum well intermixing[J]. Materials Science in Semiconductor Processing, 16, 738-741(2013).
[16] Gareso P L, Buda M, Fu L et al. Suppression of thermal atomic interdiffusion in C-doped InGaAs/AlGaAs quantum well laser structures using TiO2 dielectric layers[J]. Applied Physics Letters, 85, 5583-5585(2004).
[17] Gao Q, Tan H H, Fu L et al. Effects of thermal stress on interdiffusion in InGaAsN/GaAs quantum dots[J]. Applied Physics Letters, 84, 4950-4952(2004).
[18] Pan Z, Li L H, Zhang W et al. Effect of rapid thermal annealing on GaInNAs/GaAs quantum wells grown by plasma-assisted molecular-beam epitaxy[J]. Applied Physics Letters, 77, 1280-1282(2000).
[19] Ge X H, Zhang R Y, Guo C Y et al. Multiple factor ion implantation-induced quantum well intermixing effect[J]. Laser & Optoelectronics Progress, 57, 011409(2020).
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Tianjiang He, Hongqi Jing, Lingni Zhu, Suping Liu, Xiaoyu Ma. Quantum Well Intermixing of 915 nm InGaAsP/GaAsP Primary Epitaxial Wafers[J]. Acta Optica Sinica, 2022, 42(1): 0114003
Category: Lasers and Laser Optics
Received: Jun. 18, 2021
Accepted: Jul. 19, 2021
Published Online: Dec. 22, 2021
The Author Email: Jing Hongqi (jinghq@semi.ac.cn)