Measurement Method for Numerical Aperture of Projection Lens Based on Ronchi Lateral Shearing Interferometry

Yunjun Lu; Zhongliang Li; Feng Tang; Xiangzhao Wang

doi:10.3788/CJL221546

Chinese Journal of Lasers, Volume. 50, Issue 13, 1304006(2023)

Measurement Method for Numerical Aperture of Projection Lens Based on Ronchi Lateral Shearing Interferometry

Yunjun Lu^1,2, Zhongliang Li^1,2、*, Feng Tang¹, and Xiangzhao Wang¹

¹Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Yunjun Lu, Zhongliang Li, Feng Tang, Xiangzhao Wang. Measurement Method for Numerical Aperture of Projection Lens Based on Ronchi Lateral Shearing Interferometry[J]. Chinese Journal of Lasers, 2023, 50(13): 1304006

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Paper Information

Category: Measurement and metrology

Received: Dec. 19, 2022

Accepted: Feb. 8, 2023

Published Online: Jul. 5, 2023

The Author Email: Li Zhongliang (lizhongliang@siom.ac.cn)

DOI:10.3788/CJL221546

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology