Acta Optica Sinica, Volume. 24, Issue 11, 1450(2004)
The Effect of Particle Energy on Surface Morphology of Titanium Thin Films Deposited by Ion Beam Sputtering
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Effect of Particle Energy on Surface Morphology of Titanium Thin Films Deposited by Ion Beam Sputtering[J]. Acta Optica Sinica, 2004, 24(11): 1450