Acta Optica Sinica, Volume. 24, Issue 11, 1450(2004)

The Effect of Particle Energy on Surface Morphology of Titanium Thin Films Deposited by Ion Beam Sputtering

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Effect of Particle Energy on Surface Morphology of Titanium Thin Films Deposited by Ion Beam Sputtering[J]. Acta Optica Sinica, 2004, 24(11): 1450

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    Paper Information

    Category: Thin Films

    Received: Aug. 21, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (qhj@mail.siom.ac.cn)

    DOI:

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