[1] [1] BOS E J C. Aspects of tactile probing on the micro scale [J]. Precision Engineering(S0141-6359)，2011，35(2)：228-240.

[3] [3] FAN Kuangchao，FEI Yeitai，YU Xiaofen，et al. Development of a Low-Cost Micro-CMM for 3D Micro and Nano-measurements [J]. Measurement Science & Technology(S0957-0233)，2006，17(3)：524–532.

[4] [4] J.ger G，Manske E，Hausotte T. Nano positioning and measuring machine [J]. Measurement(S0263-2241)，2010，43(9)： 1099–1105.

[5] [5] Takamasu K，Furutani K R. Development of nano-CMM (coordinate measuring machine with nanometer resolution) [C]// Proceedings of the XIV IMEKO World Congress(Finland)，Tampere，Finland，June 1–6，1997: 34–39.

[6] [6] CHU Chih-Liang，CHIU Chenyu. Development of a low-cost nanoscale touch trigger probe based on two commercial DVD pick-up heads [J]. Measurement Science & Technology(S0957-0233)，2007，18(7)：1831–1842.

[7] [7] CUI Jiwen，LI Lei，TAN Jiubin. Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios [J]. Optics Letters(S0146-9592)，2011，36(23)：4689–4691.

[8] [8] CUI Jiwen，FENG Kunpeng，LI Junying，et al. Development of a double fiber probe with a single fiber Bragg grating for dimensional measurement of microholes with high aspect ratios [J]. Optics Letters(S0146-9592)，2014，39(10)：2868–2871.

[9] [9] Liebrich T，Knapp W. New concept of a 3D-probing system for micro-components [J]. Annals of the CIRP(S0007-8506)， 2010，59(1)：513–516.

[10] [10] Michihata M，Takaya Y，Hayashi T. Nano position sensing based on laser trapping technique for flat surfaces [J]. Measurement Science & Technology(S0957-0233)，2008，19(8)：817–822.

[11] [11] Hughes E B，WilsonA，Peggs G N. Design of high accuracy CMM based on multilateration techniques [J]. Annals of the CIRP(S0007-8506)，2000，49(1)：391–394.

[12] [12] Muralikrishnan B， Stone J A， Stoup J R. Fiber deflection probe for small hole metrology [J]. Precision Engineering(S0141-6359)，2006，30(2)：154–164.

[13] [13] Aküng F Meli，Thalmann R. Ultraprecision micro-CMM using a low force 3D touch probe [J]. Measurement Science & Technology(S0957-0233)，2007，18(2)：319–327.

[14] [14] Bos E J C. Aspects of tactile probing on the micro scale [J]. Precision Engineering(S0141-6359)，2011，35(2)：228–240.

[15] [15] Dai G L，Bütefisch S，Pohlenz F，et al. A high precision micro/nano CMM using piezoresistive tactile probes [J]. Measurement Science & Technology(S0957-0233)，2009，20(8)：1118–1121.

[16] [16] Peiner E. Tactile probes for dimensional metrology with micro components at nano meter resolution [J]. Measurement Science & Technology(S0957-0233)，2008，19(19)：579–588.

[19] [19] LI Ruijun，XIANG Meng，FAN Kuangchao，et al. Optimal design of a touch trigger probe [J]. Proceedings of SPIE(S0277-786X)，2014，94461：1-7.

[20] [20] Wim P van Vliet，Peter H J Schellekens. Development of a fast mechanical probe for coordinate measuring machines [J]. Precision Engineering(S0141-6359)，1998，22(3)：141–152.

[21] [21] LI Ruijun，FAN Kuangchao，ZHOU Hao，et al. Elastic mechanism design of the CMM contact probe [J]. Proceedings of SPIE(S0277-786X)，2013，89160：1–10.