Opto-Electronic Engineering, Volume. 43, Issue 8, 1(2016)
A Touch Trigger 3D Probe for Micro/Nano Measurement
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
LI Ruijun, LI Xinyuan, XIANG Meng, CHENG Zhenying, FAN Guangzhao. A Touch Trigger 3D Probe for Micro/Nano Measurement[J]. Opto-Electronic Engineering, 2016, 43(8): 1
Paper Information
Category:
Received: Nov. 2, 2015
Accepted: --
Published Online: Sep. 12, 2016
The Author Email: Ruijun LI (rj-li@hfut.edu.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20