To meet the requirement of high precision 3D measurement for MEMS devices, a new high precision touch trigger probe for micro-Nano/CMM is developed. Only one Quadrant Photo Diode (QPD) based two-dimensional angle sensor was used in this probe, which can detect the ball tip’s 3D motions of the probe precisely at the same time. The probe was introduced and analyzed. The sensitivity and stiffness models of the probe were achieved, and the optimal structural parameters of the probe were obtained. Several experiments have been conducted to test the stiffness, measurement range, sensitivity and repeatability of the probe. The experimental results demonstrate that the probe has 1 mN/μm uniform stiffness in 3D, the permitted measurement range is more than 12 μm and the sensitivity is about 0.5 mV/nm in 3D. The drift is about 20 nm in 1.3 hours when the environment temperature is controlled to (20±0.025)℃, and the repeatability is less than 40 nm (K=2). The probe has the advantages of high precision, low stiffness, small size, low cost and good assembly which can be applied to Micro/Nano CMM.