Optics and Precision Engineering, Volume. 33, Issue 5, 741(2025)
Design and experiment of multi-beam electron source
Figures & Tables(18)
Fig. 2. Schematic diagram of collimating lens and the off-axis beamlet deflection error
Fig. 4. Collimated electron beam trajectories and spot sizes on different planes
Fig. 5. Mechanical design of aperture plate and micro-arrayed einzel lens
Fig. 9. Image of multi-beam electron gun and multi-beam experimental platform
Fig. 12. Distribution of beam half-angles with position before and after collimation
Fig. 13. Intensity distribution of beamlet spots in
Table 1. Simulation parameters and resulting performance of collimator lens
View tableView in ArticleTable 1. Simulation parameters and resulting performance of collimator lens
仿真参数 值 内径/mm 3 厚度/mm 1 极板间距/mm 1 上下极板电压/V 4 500 中间极板电压/V 660 束斑直径/μm 622.5 束半角/mrad 1.50 总束流/μA 2.31 束流密度/（A·m-2） 7.60
Table 2. Calculated half-angles of 8×8 beamlets
View tableView in ArticleTable 2. Calculated half-angles of 8×8 beamlets
列数 行数 2 3 4 5 6 7 8 9 3 0.00 0.23 0.45 0.63 0.81 0.93 0.94 0.82 4 0.17 0.25 0.43 0.59 0.74 0.85 0.83 0.70 5 0.30 0.31 0.42 0.57 0.66 0.72 0.66 0.47 6 0.37 0.36 0.44 0.50 0.57 0.55 0.46 0.18 7 0.35 0.36 0.39 0.42 0.41 0.32 0.14 -0.23 8 0.22 0.24 0.23 0.20 0.13 -0.03 -0.33 -0.82 9 -0.09 -0.07 -0.10 -0.17 -0.32 -0.58 -1.02 -1.71 10 -0.63 -0.60 -0.64 -0.78 -1.05 -1.44 -2.07 -3.08
Table 3. Parameters of focused 3×3 beamlet spots under focusing voltage of 1 500 V
View tableView in ArticleTable 3. Parameters of focused 3×3 beamlet spots under focusing voltage of 1 500 V
束斑编号 束斑直径
/μm
束斑强度 束斑间距/μm x方向 y方向 1 5.29 234.68 61.16 60.05 2 5.01 232.35 62.12 61.41 3 5.28 238.08 - 61.73 4 5.59 243.72 61.06 61.52 5 5.50 239.23 59.56 60.63 6 5.61 225.40 - 61.06 7 5.22 235.82 62.59 - 8 5.19 223.57 62.14 - 9 5.23 230.99 - -
Table 4. Variation of beamlet spots with focusing voltage
View tableView in ArticleTable 4. Variation of beamlet spots with focusing voltage
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电压/V
束斑
直径/μm
束斑
间距/μm
偏移量/μm x方向 y方向 0 19.42 65.50 0.00 0.00 600 18.11 66.24 -4.02 -0.61 900 15.24 63.76 -7.81 -1.81 1 200 11.67 62.77 -10.78 -2.22 1 500 5.50 61.25 -13.47 -3.28 1 800 9.22 59.54 -17.04 -5.11 2 100 21.89 56.93 -20.85 -6.86 2 400 42.46 54.14 -24.43 -9.80
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Weixia ZHAO, Lingchao BAI, Lixin ZHANG, Junbiao LIU, Bohua YIN, Li HAN. Design and experiment of multi-beam electron source[J]. Optics and Precision Engineering, 2025, 33(5): 741
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Received: Nov. 20, 2024
Accepted: --
Published Online: May. 20, 2025
The Author Email: Lixin ZHANG (zhanglx@mail.iee.ac.cn)
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