InGaAs Surface Cleaning Based on Scanning Focused XPS Technique

Minmin Rong; Yijun Zhang; Shiman Li; Gangcheng Jiao; Weixin Liu; Ziheng Wang; Zhaoxin Shu; Yunsheng Qian

doi:10.3788/AOS202141.0516004

Acta Optica Sinica, Volume. 41, Issue 5, 0516004(2021)

InGaAs Surface Cleaning Based on Scanning Focused XPS Technique

Minmin Rong¹, Yijun Zhang^1、*, Shiman Li¹, Gangcheng Jiao², Weixin Liu³, Ziheng Wang¹, Zhaoxin Shu¹, and Yunsheng Qian¹

¹School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China

²Science and Technology on Low-Light-Level Night Vision Laboratory, Xi′an, Shaanxi 710065, China

³No. 808 Institute, Shanghai Academy of Spacecraft Technology, Shanghai 201109, China

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Minmin Rong, Yijun Zhang, Shiman Li, Gangcheng Jiao, Weixin Liu, Ziheng Wang, Zhaoxin Shu, Yunsheng Qian. InGaAs Surface Cleaning Based on Scanning Focused XPS Technique[J]. Acta Optica Sinica, 2021, 41(5): 0516004

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Paper Information

Category: Materials

Received: Sep. 3, 2020

Accepted: Nov. 2, 2020

Published Online: Apr. 7, 2021

The Author Email: Zhang Yijun (zhangyijun423@126.co)

DOI:10.3788/AOS202141.0516004

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology