Acta Optica Sinica, Volume. 26, Issue 9, 1363(2006)

Effect of Tilt Angle of Surface to be Measured on Differential Confocal Microscope Pointing Signal

[in Chinese]* and [in Chinese]
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    References(7)

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    [1] Sha Dingguo, Jiang Qin, Zhao Weiqian, Qiu Lirong. Review and Expectation of Non-Coaxial Laser Confocal Microscopy[J]. Chinese Journal of Lasers, 2010, 37(5): 1157

    [2] LI Xinyue, WANG Wenbin, XIONG Zhefeng, LI Menghan, Xu Kemi, Qiu Lirong. Laser differential confocal sensor for freeform surface measurement[J]. Optical Technique, 2022, 48(4): 403

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    [in Chinese], [in Chinese]. Effect of Tilt Angle of Surface to be Measured on Differential Confocal Microscope Pointing Signal[J]. Acta Optica Sinica, 2006, 26(9): 1363

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: --

    Accepted: --

    Published Online: Sep. 14, 2006

    The Author Email: (aeolus@xmu.edu.cn)

    DOI:

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