Acta Optica Sinica, Volume. 26, Issue 9, 1363(2006)
Effect of Tilt Angle of Surface to be Measured on Differential Confocal Microscope Pointing Signal
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[in Chinese], [in Chinese]. Effect of Tilt Angle of Surface to be Measured on Differential Confocal Microscope Pointing Signal[J]. Acta Optica Sinica, 2006, 26(9): 1363
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