High Power Laser and Particle Beams, Volume. 37, Issue 6, 061007(2025)

Study on diffraction performance of SU-8 micron grating

Jingpeng Li1, Jue Wang1, Xuefeng Zhang1, Yi Li1, Qin Dai1, Jianfeng Cui1, Lei Wang2, and Rina Wu1、*
Author Affiliations
  • 1College of Science, Shenyang University of Technology, , Shenyang 110159, China
  • 2School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110159, China
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    References(19)

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    [12] [12] Wang Bin. Modification research on simplified modal method f dielectric subwavelength gratings design[D]. Changchun: Graduate School of Chinese Academy of Sciences (Changchun Institute of Optics, Precision Mechanics Physics), 2014

    [13] [13] BA Yanheshig. The study on the dispersion they, design, manufacture, efficiency test of diffraction gratings[D]. Changchun: Changchun Institute of Optics Fine Mechanics Physics (CIOMP), Chinese Academy of Sciences, 2004

    [14] [14] Zhu Yuanyuan. Study of the diffraction properties of phase gratings based on rigous coupled wave analysis (RCWA)[D]. Beijing: Minzu University of China, 2020

    [15] [15] Zhou Changhe, Zhang yanyan. Highdiffraction efficiency quartz transmission grating of 632.8 nano wavelength: CN1693930A[P]. 20051109

    [16] [16] Liu Linyue. Research on measuring groove profile parameters of subwavelength grating based on transmission spectrum retrieval method[D]. Suzhou: Suzhou University, 2015

    [17] Wang Weimin, Ruan Dongsheng, Jing Xufeng. Analysis of accuracy of scalar diffraction theory and effective medium theory for sinusoidal grating[J]. Acta Photonica Sinica, 45, 0705001(2016).

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    Jingpeng Li, Jue Wang, Xuefeng Zhang, Yi Li, Qin Dai, Jianfeng Cui, Lei Wang, Rina Wu. Study on diffraction performance of SU-8 micron grating[J]. High Power Laser and Particle Beams, 2025, 37(6): 061007

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    Paper Information

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    Received: Nov. 13, 2024

    Accepted: Apr. 13, 2025

    Published Online: Jun. 23, 2025

    The Author Email: Rina Wu (wurina2007@126.com)

    DOI:10.11884/HPLPB202537.240392

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